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Sputtering System

V-1. SRN-110 SPUTTERING SYSTEM

V-1. SRN-110 SPUTTERING SYSTEM

■ Six-sided transport chamber ( eight-sided option )

■ Two vacuum cassette loadlocks with automatic doors

■ Robotic arm for wafer handling

■ Isolation valves

■ Integrated wafer alignment module

■ Capacity to four independent process chambers

■ Available to RF and DC process

■ Full erosion target surface

□ Low particle process

□ Long target life time

■ High vacuum pumping system ( turbo or cryo pump )

문의안내
  • phone number TEL. 031-357-6283
    제품문의. 010-4772-2790
  • phone number FAX. 031-357-6287
  • Email address

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